SemiWiki· 2026-10-18 23:00(北京时间) ·重要度 36

Maskless EUV Lithography: An Alternative to E-Beam

EUV 英文

Semiconductor manufacturing depends on lithography: the process of transferring tiny circuit patterns onto a silicon wafer. Conventional extreme-ultraviolet (EUV) lithography projects light with a wavelength of 13.5 nanometers through a reflective optical system, using a custom photomask to define each layer. It can … Read More The post Maskless EUV Lithography: An Alternative to E-Beam appeared first on SemiWiki .

本站仅提供摘要,完整内容请阅读原文(版权归原媒体所有)
https://semiwiki.com/lithography/373583-maskless-euv-lithography-an-alternative-to-e-beam/
阅读原文 ↗